【News】*Polarizers for deep ultraviolet region
Polarizers with an extinction ratio of around 100:1 for wavelengths
from 193nm to 220nm.
Being WGP, there is little dependence on the accuracy of incident light.
Synthetic quartz (OHARA QUARTZ SK-1300) is used as the substrate, and
since it is made of inorganic material, it can be used under vacuum
and high temperature (≤400 Celsius) conditions.


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【News】*Polarizers for deep ultraviolet region
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【News】Double patterning with 80nm pitch is realized by double patterning!
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【Media】A representative interview was posted in the electronic device industry newspaper.
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【News】We completed a large area master mold!
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【Media】A representative interview was posted in the electronic device industry newspaper.
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【News】 We opened a website.
 
