PRODUCT
SEMICONDUCTOR PHOTOLITHOGRAPHY MACHINE : Im-ArF, Dry-ArF, KrF, i-ray
Wafer : 8inch（Si、Quartz、Glass etc.）、12inch（Si）
Im-ArF
KrF
Tiling patterning（Tiling patterning）
Line & Space
Pillar array
・Etching service
Oxide：SiO2, TiO2, Ta2O5, etc.
Metal : Cr, Al, Ta, Ti, etc.
Nitride : SiN, TiN, etc.
SiO2
SiO2
TiO2
Ta
・Film formation service(PVD , ALD, CVD, etc)
metal Various
Oxide Various
reflective film, AR film, Design – prototype, manufacture
Thick film SiO2 ALD
ALD metal：SiO2, TiO2, Al2O3, ZrO2, Nb2O3, ZnO, Al2O3-SiO2, Multilayer film, etc.
*Sample film formation is also OK
・Others (cutting, lift-off, sale of Si Wafer and glass wafers, etc.)
300mm Si seamless Mold
8inch seamless Quartz Mold
16-layer DOE
Blazed Grating
2-layer DOE
Nano pillar array
・Phase plate prototype
Cross-sectional shape
Reference distribution